產(chǎn)品介紹 Product introduction
四氟化鈦,又稱
氟化鈦,分子式為TiF
4,分子量為123.86,熔點為284℃,是一種具有吸濕性的白色粉末。四氟化鈦溶于冷水中可分解,溶于硫酸、乙醇和吡啶,不溶于乙醚。四氟化鈦在微電子工業(yè)、石化等行業(yè)中具有重要的應(yīng)用。
Titanium tetrafluoride is also called titanium fluoride, its molecular formula is TiF4, molecular weight is 123.86, melting point is 284 ℃. Titanium tetrafluoride is a kind of hygroscopic white powder. Titanium tetrafluoride decomposes when it dissolves in cold water, it is soluble in sulfuric acid, ethanol and pyridine but it is insoluble in ether. Titanium tetrafluoride has important applications in microelectronics industry and petrochemical industry.
產(chǎn)品用途 Application
在電子工業(yè)中,四氟化鈦可用于成膜材料或離子注入摻雜,形成硅化鈦或鈦膜,制作低電阻、高熔點的電路互聯(lián)線和柵極。四氟化鈦在石化行業(yè)中可用作催化劑。
In the electronics industry, titanium tetrafluoride can be used for film forming materials and ion implantation doping, and consequently titanium silicide or titanium film is formed to produce interconnects and grid electrode with low resistance and high melting point. Titanium tetrafluoride can be used as catalyst in petrochemical industry.
包裝、貯存 Packaging and storage
四氟化鈦儲存于密封的銅質(zhì)容器中,包裝規(guī)格為10g、100g,具體包裝規(guī)格可根據(jù)用戶需求定制更改。四氟化鈦儲存于陰涼、通風(fēng)的庫房,庫溫不宜超過37℃,保持容器密封,遠離火種、熱源。儲區(qū)應(yīng)備有泄漏應(yīng)急處理設(shè)備和合適的收容材料。
Titanium tetrafluoride is stored in sealed copper containers with packing specifications of 10g and 100g. Specific packaging specifications can be customized according to users’ requirements. Titanium tetrafluoride is stored in shady and ventilated storeroom, temperature of storeroom is lower than 37℃, container is keeping seal away from fire and heat source. The storage area shall be equipped with equipment for emergency.